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Thanks, Steve.
I have just found the potential health effects with HMDS contact..

"Inhalation:
Excessive inhalation of vapors can irritate the respiratory tract and possibly lead to fluid accumulation in the lungs. Mild anesthesia has also been reported.
Ingestion:
Toxicity data limited. Not considered a serious hazard although ammonia and hydrous silica compounds may be formed by hydrolysis in the digestive system. Gastrointestinal upset may follow the ingestion of appreciable amounts. Vomiting can present the additional hazard of getting HMDS into the lungs.
Skin Contact:
Moderate irritant, especially to sensitive areas. Alkaline reaction can cause soreness with inflammation in acute cases. May be absorbed through skin.
Eye Contact:
Irritant, may cause severe burns on direct contact with liquid HMDS.
Chronic Exposure:
No information found.
Aggravation of Pre-existing Conditions:
Persons with pre-existing skin disorders or eye problems or impaired respiratory function may be more susceptible to the effects of the substance. "